This workshop aims to acquaint participants with the BEAMER interface and controls, allowing them to enhance their data preparation practices for better e-beam lithography results. By the end of this session, the user should be able to create their own flows, inspect/prepare their data and import/export their layout to the machine format. We highly encourage participants of all skill levels to attend. While some of you might be gearing up for the next day's CNF user events, we extend an invitation to all of you to participate in whichever segment of the session you can manage.

Topics to be covered:

  *  Module Fundamentals (Import, Export, Bias, Heal, Extract, etc.)
  *  VIEWER Basics
  *  Export Module
  *  Field Control Options, floating, multipass, etc
  *  Fracturing Modes
  *  Proximity Effect Correction
  *  TRACER for custom material stacks
  *  Visual Job for easily creating jdf and sdf files
  *  ProSEM for accurate SEM imaging

After the training session, we will use any remaining time for applications questions. This is your opportunity to bring your patterns, process and experimental data for in-person support from GenISys representatives. Please feel free to bring any data you are interested in optimizing for exposure, including the relevant pattern process data (.GDS, .OAS, .DXF, etc), the chosen material stack, and the write settings.
 

Requirements:

* You must have a Windows OS computer (MAC OS, including MAC with Emulators won't be able to run the software).

* A wheeled mouse is strongly recommended.

* User will be provided with a temporary BEAMER license on a USB stick for WINDOWS for the day plus demo flows and patterns for various exercises. After the session the user won’t have use of the license but will still have the use of the manual, videos, demo flows and patterns.

Agenda:

  _9:00 am to 9:30 am (EDT): Coffee and computer setup (WINDOWS + Mouse)_

  _9:30 am to 12:30 pm (EDT): BEAMER + TRACER Training_
  _12:30 pm to 1:00 pm (EDT): Lunch sponsored by GenISys_
  _1:00 pm to 1:30 pm (EDT): Visual Job_
  _1:30 pm to 3:00 pm (EDT): Advanced BEAMER functions and ProSEM_
  _3:00 pm to 4:30 pm (EDT): Application Support_

Please Register Online